SiSiC paddles are the key parts of semiconductor wafer loading system. They're good at high temperature with max loads & no deflection. And they're suitable for robot antomated loading & transferring systems.
Forming Method: Slip-Casting
Silicon carbide cantilever paddle, SiSiC paddles for semiconductor wafer loading system.
The cantilever paddle has stable performance, does not deform in high temperature environments, has a large wafer loading capacity.
And it's suitable for automatic robot loading and handing systems. Can also provide furnace tube, wafer boat and boat holder.
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